| 摘要 |
PROBLEM TO BE SOLVED: To provide a static eliminator and a chamber equipped with the same which allow proximity irradiation of ultraviolet rays. SOLUTION: A supporter 6 is provided which is extendable from the outer wall 3a of a chamber 3 toward a charged body 5 in the chamber 3. A deuterium lamp 10 is supported on the supporter 6. The deuterium lamp 10 is cooled using a cooling path 22i installed in the supporter 6. A gas to be ionized is supplied near to a light outgoing window 11c of the deuterium lamp 10 by a gas supply path 8. Consequently, the deuterium lamp 10 can be disposed in the chamber 3, and the charged body 5 is discharged by proximately irradiating ultraviolet rays by disposing the deuterium lamp 10 proximately to the charged body 5. COPYRIGHT: (C)2007,JPO&INPIT
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