| 摘要 |
<p>The present invention relates to a packaging of a silicon condenser microphone and method for manufacturing the same. The packaging structure of a silicon condenser microphone of the present invention comprises a substrate having an upper surface for disposing the silicon condenser microphone and a circuit unit thereon, the substrate having a back chamber therein, the substrate including an air hole for an air to pass through between the upper surface for disposing the silicon condenser microphone and the back chamber; and a casing covering the silicon condenser microphone and the circuit unit disposed on the upper surface of the substrate for protection thereof. The method for manufacturing a packaging structure of a silicon condenser microphone of the present invention comprises steps of: (a) forming a substrate having a back chamber therein, wherein the substrate includes an air hole for an air to pass through between an upper surface of the substrate, the air hole disposed at a portion of the upper surface where the silicon condenser microphone and a circuit unit is to be disposed; (b) bonding the silicon condenser microphone and the circuit unit to the upper surface of the substrate; and (c) covering the silicon condenser microphone and the circuit unit with a casing to protect the silicon condenser microphone and the circuit unit.</p> |
