SYSTEM AND METHOD FOR SURFACE INSPECTION OF MICRO AND NANOMECHANICAL STRUCTURES,申请号CA20062626230-传众专利搜索

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发明名称	SYSTEM AND METHOD FOR SURFACE INSPECTION OF MICRO AND NANOMECHANICAL STRUCTURES
摘要
申请公布号	CA2626230(A1)	申请公布日期	2007.01.18
申请号	CA20062626230	申请日期	2006.07.13
申请人	CONSEJO SUPERIOR DE INVESTIGACIONES CIENTIFICAS	发明人	CALLEJA GOMEZ, MONTSERRAT;MERTENS, JOHAN;TAMAYO DE MIGUEL, FRANCISCO JAVIER
分类号	G01Q10/06;G01Q20/02	主分类号	G01Q10/06
代理机构		代理人
主权项
地址

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