| 摘要 |
PROBLEM TO BE SOLVED: To achieve further miniaturization, weight reduction, and easier assembling workability of a planar type electromagnetic actuator that drives a movable portion by the interaction of magnetic field by means of a driving coil and magnetostatic field by a magnetostatic field generating means. SOLUTION: This planar-type electromagnetic actuator is constituted of a semiconductor substrate on which a frame-shaped support portion 11, the movable portion 13, and a pair of torsion bars 12, 12 that support the movable portion 13 rotatably within the frame of the support portion 11 are formed integrally; the drive coil 14 and a reflecting mirror 15 provided on the movable portion 13; a frame-shaped yoke 16 provided on the support portion 13, in such a way as to surround the movable portion 13; and a pair of thin film magnets 17, 17, which make the magnetostatic field act on the driving coil 14 of both opposite side portions parallel to the torsion bars 12, 12 of the movable portion 13, provided in the range of a support portion 11 inside the yoke 16 so as to face each other sandwiching the movable portion 13 and contact the yoke 16. COPYRIGHT: (C)2007,JPO&INPIT
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