摘要 |
PROBLEM TO BE SOLVED: To provide a manufacturing method of a piezoelectric device whereby a lid can be sealed to a package without attaching a gas component to a piezoelectric resonator element in the package, an oscillated frequency of the piezoelectric resonator element can be fine-adjusted, the piezoelectric device whose oscillation characteristic is not fluctuated can thereby be provided. SOLUTION: In the piezoelectric device wherein the piezoelectric resonator element is mounted to an internal space of the rectangular package, a rectangular first lid for covering the internal space of the package is arranged to a side wall top part of the package, and the first lid is fixed to a conductor pattern provided to the side wall top part, it is characterized in that an opening is formed to the first lid and a second lid air-tightly seals the piezoelectric resonator element in the internal space of the package so as to cover the opening. COPYRIGHT: (C)2007,JPO&INPIT
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