摘要 |
PROBLEM TO BE SOLVED: To provide a thin film transistor element for liquid crystal displays and its method for manufacturing having high manufacture yield and enabling the reduction of costs and times required for the manufacturing process. SOLUTION: The thin film transistor element for liquid crystal displays includes a gate electrode formed on a transparent insulating substrate, a gate insulating film formed with glass composite, a semiconductor layer, a source electrode, and a drain electrode. The manufacturing method of the thin film transistor element for liquid crystal displays includes a step to form the gate electrode on the transparent insulating substrate, a step to form the gate insulating layer with the glass composite, a step to form the semiconductor layer, and a step to form the source electrode and the drain electrode. COPYRIGHT: (C)2007,JPO&INPIT
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