摘要 |
PROBLEM TO BE SOLVED: To provide a vacuum valve with improved withstand voltage characteristics which can be obtained by trapping metal vapor during conditioning treatment. SOLUTION: This vacuum valve comprises a vacuum insulating envelope 1; a fixed-side sealing fitting 2 sealed to the opening end face of the vacuum insulating envelope 1; a fixed-side current conducting rod 4 which passes through and is fixed to the fixed-side sealing fitting 2; a fixed-side contact 5 fixed to the fixed-side current conducting rod 4; a fixed-side contact protection shield 10 formed so as to surround the fixed-side contact 5; a movable-side sealing fitting 3 sealed to the other opening end face of the vacuum insulating envelope 1; a movable-side current conducting rod 7 which passes through the movable-side sealing fitting 3 so as to move freely; a movable-side contact 6 fixed to the movable-side current conducting rod 7; a bellows 8 an end of which is sealed to the movable-side current-conducting rod 7 and the other end is sealed to the movable-side sealing fitting 3; a movable-side contact protection shield 11 formed so as to surround the movable-side contact 6; and a metal vapor trapping shield 12 which moves freely in the vacuum insulating envelope 1. COPYRIGHT: (C)2007,JPO&INPIT
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