| 摘要 |
PROBLEM TO BE SOLVED: To provide a micropump having a construction simplified and reduced in size as compared with a conventional micropump and to provide a micropump system. SOLUTION: In the micropump 1 of the invention, a flow path substrate 2 is provided with a pressure chamber 3 having one end and another end and storing liquid inside, the one end of the pressure chamber 3 is connected with a flow path 4 having flow path resistances different according to a direction in which the liquid flows, the other end of the pressure chamber is opened, and an actuator 6 is provided for generating a pressure wave to the liquid in the pressure chamber 3, which is propagated between the one end and the other end. COPYRIGHT: (C)2007,JPO&INPIT
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