发明名称
摘要 A coating has a cylindrical body (914) comprising upper and lower edges, and a flange extending radially outwards from the upper edge. A recess (932) is formed in an outer surface of the body. A slit (938) is arranged in the recess and passes through the body, where the body is coated by yttrium or yttrium oxide. A lip (918) extends from an inner surface of the body in a radially inward manner, where the lip has an upper surface.
申请公布号 JP3128562(U) 申请公布日期 2007.01.18
申请号 JP20060008343U 申请日期 2006.10.13
申请人 发明人
分类号 H01L21/3065;(IPC1-7):B62D1/16;B60R21/05;F16F7/00 主分类号 H01L21/3065
代理机构 代理人
主权项
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