ADJUSTMENT ARRANGEMENT OF AN OPTICAL ELEMENT

摘要

A arrangement serves for the adjustment of an optical element ( 1 ), in particular of a lens in an optical system, in particular in a projection lens system for semiconductor lithography. The optical element ( 1 ) is mounted in a mount ( 3 ) by means of a number of bearing feet ( 2 ) distributed over the circumference of the optical element ( 1 ) and is selectively deformable by actuators ( 5 ). At least some of the bearing feet ( 2 ) are engaged by the actuators ( 5 ) in a region of the respective bearing foot ( 2 ) in such a way that the respective bearing foot ( 2 ) can be displaced in the direction of the optical axis ( 7 ).