发明名称 |
TEST PROBE AND TESTER, METHOD FOR MANUFACTURING THE TEST PROBE |
摘要 |
A test probe having a conductive part electrically connected to terminals of a test-object device, including: a silicon substrate; a protrusion made of resin provided on the silicon substrate; a first conductive part which is provided on the protrusion and comes in contact with the terminals; and a second conductive part which is provided in a region other than a region having the protrusion on the silicon substrate and is electrically connected to the first conductive part.
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申请公布号 |
US2007013393(A1) |
申请公布日期 |
2007.01.18 |
申请号 |
US20060532654 |
申请日期 |
2006.09.18 |
申请人 |
SEIKO EPSON CORPORATION |
发明人 |
ITO HARUKI;MIZUNO SHINJI;YAMAGUCHI KOJI |
分类号 |
G01R31/02 |
主分类号 |
G01R31/02 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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