SYSTEM AND METHOD FOR THE INSPECTION OF MICRO AND NANOMECHANICAL STRUCTURES

摘要

The invention relates to a system for the inspection of surfaces, which is configured to detect vibration and/or relative displacement characteristics at different points of various elements (51) forming part of a mechanical structure (5), such as a micro or nanomechanical structure. According to the invention, a light beam is moved by the mechanical structure along a first path (A) in order to detect different successive reference positions (C) along the length of said path (A) and the light beam is also moved by the mechanical structure along various secondary paths (B) which are each associated with one of the aforementioned reference positions (C). In addition, the invention relates to a corresponding method and a program for performing said method.