发明名称 EVAPORATION CELL WITH HIGH MATERIAL USAGE FOR OLED MANUFACTURING
摘要 An evaporation source for commercial production of organic light emitting diodes for improving the consumption amount of organic materials, which increases the consumption amount of the organic materials substantially while maintaining thickness uniformity of an organic thin film during commercial production of the organic light emitting diodes, is provided. An evaporation source for improving the consumption amount of organic materials has a shape in which several cylindrical jet nozzles(6,7) are assembled on an upper portion of a rectangular parallelepiped crucible(5). The cylindrical jet nozzles have different diameters(d1,d2) and lengths(L1,L2) to adjust a gas amount of an organic material accumulated on a substrate through different jet nozzles. The evaporation source further comprises a heating wire for heating the rectangular parallelepiped crucible and the cylindrical jet nozzles formed on the upper portion of the crucible. The evaporation source has a structure in which a plurality of bent cylindrical jet nozzles is assembled onto the upper portion of the rectangular parallelepiped crucible.
申请公布号 KR20070009354(A) 申请公布日期 2007.01.18
申请号 KR20050064528 申请日期 2005.07.15
申请人 OLEDON TECHNOLOGY INC. 发明人 KIM, SUNG SU;KIM, TAE WAN
分类号 C23C14/12;C23C14/00 主分类号 C23C14/12
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