| 摘要 |
Polishing equipment including a button-type locking apparatus is provided to contribute to improvement of work efficiency by easily separating a carrier head of a polishing apparatus from a spindle while pressing a button. A carrier head for supporting a substrate is provided. The carrier head is rotated by a spindle. The carrier head is fixed/separated to/from the spindle by a clamp(20). The clamp includes a locking apparatus and a button(25). The locking apparatus locks/unlocks the carrier head into/from the spindle. The lock state of the locking apparatus is unlocked by the button. The clamp further includes first and second arms(21,22) and a hinge(23). The outer circumference of the carrier head is surrounded by the first and the second arms of a semicircle type. An end of the first arm is connected to an end of the second arm by the hinge.
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