| 摘要 |
Provided is a slurry composition, which contains a reduced content of metal oxide, has an improved polishing speed, reduces a polishing process cost, and hardly causes environmental pollution. The slurry composition comprises 0.01-5wt% of metal oxide, 0.1-2.0wt%, based on the weight of the metal oxide, of a polishing accelerator, 0.01-0.05wt%, based on the weight of the metal oxide, of a dispersion stabilizer, and the balance of deionized water and/or a pH controller. A content of the metal oxide is 0.1-0.5wt% based on the slurry composition. The metal oxide is ceria, silica, alumina, titania, zirconia, germania, or a mixture thereof.
|
