| 摘要 |
PROBLEM TO BE SOLVED: To provide a thermoelectric transducer having a super-lattice structure and a high thermoelectric performance. SOLUTION: The thermoelectric transducer 1 has a super-lattice structure 20 formed by alternately laminating first layers 11 containing Si and second layers 12 containing Ge and Au, and both the first and second layers 11, 12 are amorphous. The method of manufacturing the thermoelectric transducer 1 has the super-lattice structure 20 includes a step of alternately laminating the first layers 11 and the second layers 12 at -100°C to 400°C, by the ion beam sputtering method after adjusting two or more ion beams for irradiating two or more kinds of targets. COPYRIGHT: (C)2007,JPO&INPIT
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