| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a crystal resonator piece with a perpendicular cross-sectional shape and an accurate planar shape for realizing a highly accurate frequency and to provide a manufacturing method with a high production efficiency for realizing the crystal resonator piece. <P>SOLUTION: The manufacturing method of the crystal resonator piece 10 includes: a dry etching processing step of boring grooves 13 on both front and rear sides of each vibration arm 12 and forming the crystal resonator chip 10 by leaving parts of the crystal resonator chip 10 in its cross-sectional directions of outer circumferential edges 14, 15; and a wet etching processing step of removing the parts of the crystal resonator chip 10 in the cross-sectional directions of the outer circumferential edges 14, 15. Further, the crystal resonator chip 10 is manufactured as above at a low cost, has a highly accurate resonance frequency and can attain downsizing and high frequency applications. <P>COPYRIGHT: (C)2007,JPO&INPIT |
