发明名称 APPARATUS AND METHOD FOR MANUFACTURING PROBE CARRIER INCLUDING QUALITY ENSURING PROCESS
摘要 PROBLEM TO BE SOLVED: To provide a probe carrier manufacturing apparatus, capable of efficiently judging the concentration of a probe in the spot formed on a carrier using simple operations, when a probe carrier, which is constituted by fixing different probes on the carrier, is manufactured, and to provide a probe carrier manufacturing method. SOLUTION: The condition of the liquid droplet spot formed on the carrier is measured to be compared with known data to conveniently determine the condition of the probe, such as presence of the probe in liquid droplet spot or its concentration. COPYRIGHT: (C)2007,JPO&INPIT
申请公布号 JP2007010499(A) 申请公布日期 2007.01.18
申请号 JP20050192085 申请日期 2005.06.30
申请人 CANON INC 发明人 TAKAHATA KAZUAKI;ISHIBASHI TORU
分类号 G01N33/53;G01N37/00 主分类号 G01N33/53
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