| 摘要 |
PROBLEM TO BE SOLVED: To avoid the risk that a heater electrode pattern of a thin film wrinkles, cracks, peels, etc., by forming the heater electrode pattern on a polymer optical waveguide in excellent contact and minimizing surface damage that the polymer optical waveguide has in an electrode forming process. SOLUTION: After the surface of the polymer optical waveguide (20) is activated first, a heater electrode (30) is formed on the entire surface. Then the heater electrode film (30 ) is coated with resist (40) and a resist pattern (45) is formed through photolithography processing wherein the heater electrode is patterned. Then the heater electrode pattern (35) is formed by etching the resist pattern (45). Then, the remaining resist (45) on the heater electrode pattern (35) is removed. COPYRIGHT: (C)2007,JPO&INPIT |
