发明名称 ELECTROSTATIC CHUCK AND ELECTRODE SHEET FOR ELECTROSTATIC CHUCK
摘要 <p>An electrostatic chuck having excellent attracting power and holding power is provided. The electrostatic chuck is provided with a multilayer structure wherein a first insulating layer, a first electrode layer, an interelectrode insulating layer, a second electrode layer and a second insulating layer are successively stacked on a metal base from a level close to the metal base. The second electrode layer has a plurality of openings in a prescribed flat plane region. The electrostatic chuck is composed of a pattern electrode satisfying inequalities of L/X=1.5 and L<2.6mm, where, X is a shortest distance between the adjoining openings, and L is a length of a line obtained by a foot of a perpendicular obtained when the gravity centers of the adjoining openings are projected to a virtual line parallel to the shortest distance X.</p>
申请公布号 WO2007007674(A1) 申请公布日期 2007.01.18
申请号 WO2006JP313586 申请日期 2006.07.07
申请人 CREATIVE TECHNOLOGY CORPORATION;MIYASHITA, KINYA;FUJISAWA, HIROSHI;HARANO, RIICHIRO 发明人 MIYASHITA, KINYA;FUJISAWA, HIROSHI;HARANO, RIICHIRO
分类号 H01L21/683 主分类号 H01L21/683
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