| 摘要 |
A semiconductor fabricating system is provided to easily control the transfer of a reticle through an operator interface when the reticle is transferred in a semiconductor fabricating apparatus. Information on a reticle processing state is transmitted from a semiconductor fabricating apparatus to an operator interface(200). The operator interface displays the information on the reticle processing state(210). The operator interface determines whether a user selects a reticle transfer command(220). When the reticle transfer command is selected, a transfer control signal is transmitted from the operator interface to the semiconductor fabricating apparatus(230). The semiconductor fabricating apparatus controls the transfer of the reticle in response to the reticle transfer control signal(240).
|
