| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a method for manufacturing a sintered compact target made of an indium oxide-zinc oxide which has relative density as high as 95% or more even when having a large size, and has an irregular color referred to as a white spot inhibited from forming on the surface. <P>SOLUTION: The method for manufacturing the sintered compact target made of the indium oxide-zinc oxide comprises the steps of: calcining an indium oxide-zinc oxide powder at 400°C to 800°C; press-molding the calcined indium oxide-zinc oxide powder; and then sintering it at 1,250°C to 1,450°C; or further pulverizing the calcined indium oxide-zinc oxide powder after the calcination step, and then blending an indium oxide powder with the pulverized indium oxide-zinc oxide powder; or alternatively blending the indium oxide powder with the calcined indium oxide-zinc oxide powder, and pulverizing the blend. <P>COPYRIGHT: (C)2007,JPO&INPIT |
