| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an acceleration sensor of small size with high acceleration detection sensitivity and reliability. <P>SOLUTION: This acceleration sensor is equipped with a vibration element made by disposing principal surface electrodes on two principal surfaces of a strip-like piezoelectric substrate and support members for sandwiching a part thereof. The support members are made of elastic bodies. A bend point of the vibration element is positioned in a support area where the vibration element is sandwiched between the support members. Because of this, an area of the piezoelectric substrate where strain is developed is enlarged, generated electric charge increases to increase an output voltage, and acceleration detection sensitivity can be enhanced. <P>COPYRIGHT: (C)2007,JPO&INPIT |
