COATING EQUIPMENT AND ITS OPERATING METHOD

摘要

PROBLEM TO BE SOLVED: To provide coating equipment the nozzle part of which can be prevented from being damaged owing to foreign matter on a substrate and in which foreign matter can be prevented from existing on a surface plate below the substrate and to provide a method for operating the coating equipment.

SOLUTION: The coating equipment comprises: the surface plate on which the substrate is placed; a nozzle part for jetting a resin toward the substrate to coat the substrate with the resin; a nozzle cleaning part for cleaning the nozzle part; and a surface plate cleaning part for cleaning the surface plate. The method for operating the coating equipment comprises the steps of: carrying the first coated substrate on the surface plate; cleaning the surface plate by using the surface plate cleaning part; carrying the second substrate to be coated onto the cleaned surface plate; and jetting the resin toward the second substrate from the nozzle part to coat the second substrate with the resin.

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