| 摘要 |
PROBLEM TO BE SOLVED: To provide a single crystal pulling apparatus, with which a high weight dislocation-free single crystal can be grown by a simple technique similar to the conventional technique and the falling of the single crystal into a crucible can be avoided even when breakage of a neck part occurs due to the load of a high weight single crystal, earthquake or the like, and a method for controlling the same. SOLUTION: The single crystal pulling apparatus is equipped with: a pulling means 5 for pulling the single crystal C; a single crystal supporting means 7 in which an adsorption part 7i for adsorbing the upper end C1 of the single crystal C being pulled by the pulling means 5 is provided ascendably/descendably along the pulling path of the single crystal C; a temperature detecting means 22 for detecting the temperature at the upper end part of the single crystal C being pulled by the pulling means 5; and a control means 22b for controlling the operation of the single crystal supporting means 7. The single crystal supporting means 7 has the adsorption part 7i for adsorbing the upper end C1 of the single crystal C, a suction port 7k formed in the adsorption part 7i, a negative pressure generating means 16 for generating a negative pressure for the suction port 7k, and a pad 7j of thermosoftening glass, formed at the periphery of the suction port 7k in the adsorption part 7i. COPYRIGHT: (C)2007,JPO&INPIT
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