发明名称 Optical device and method of manufacturing the same
摘要 An object of the present invention is to provide an optical device having high quality, excellent productivity and optical characteristics, and capable of suppressing a refractive index of a substrate surface from increasing when a dopant is thermally diffused into, or a heat treatment is performed in order to compensate of process distortion in stoichiometric lithium niobate crystal or a crystal substrate in which Mg is doped into the crystal, and a method of manufacturing the same. According to the present invention, there is provided a method of manufacturing an optical device including the steps of: forming a dopant layer on a substantial stoichiometric lithium niobate single crystal substrate; and diffusing a dopant in the dopant layer into at least a portion of the substantial stoichiometric lithium niobate single crystal substrate, wherein, in the diffusing step, a heat treatment is performed at a diffusion temperature of 1000° C. to 1200° C. in an atmosphere in which a gas having a dew-point temperature of 0° C. or less is introduced, preferably for a diffusion time of 3 hours or more, and more preferably 3 hours to 24 hours.
申请公布号 US2007014014(A1) 申请公布日期 2007.01.18
申请号 US20060367261 申请日期 2006.03.03
申请人 NATIONAL INSTITUTE FOR MATERIALS SCIENCE 发明人 YAMAMOTO FUTOSHI;KONDOU KATSUTOSHI;ICHIKAWA JUNICHIRO;NAKAMURA MASARU;KURIMURA SUNAO;TAKEKAWA SHUNJI;KITAMURA KENJI
分类号 G02B5/18;G02B27/44 主分类号 G02B5/18
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