| 摘要 |
A used PVD component refurbishing method includes providing a used PVD component, such as a RF coil ( 120 ), having a layer deposited on a component surface and first etching the deposited layer using a first acid-comprising etchant. After the first etching, the method includes entraining abrasive particles in a flow of gas, impinging the particles on the etched layer, and abrading the etched layer. After the abrading, the method includes second etching the abraded layer using a second acid-comprising etchant.
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