发明名称 WORKPIECE SUPPORT STRUCTURES AND APPARATUS FOR ACCESSING SAME
摘要 The present invention comprises a workpiece container for storing at least one workpiece having a bottom surface and a peripheral edge. In one embodiment, a workpiece support structure is located within the container enclosure, which forms multiple vertically stacked storage shelves within the enclosure. Each storage shelf includes, in one embodiment, a first tine and a second tine for supporting the workpiece in a substantially horizontal orientation. The bottom surface and peripheral edge of a workpiece seated on a storage shelf extends beyond the outer edge of both the first tine and the second tine. An end effector according to the present invention may engage these extended portions or "grip zones" of the workpiece.
申请公布号 WO2007008555(A2) 申请公布日期 2007.01.18
申请号 WO2006US26281 申请日期 2006.07.07
申请人 ASYST TECHNOLOGIES, INC.;BONORA, ANTHONY, C. 发明人 BONORA, ANTHONY, C.
分类号 H01L21/673 主分类号 H01L21/673
代理机构 代理人
主权项
地址