| 摘要 |
An apparatus and a method of fabricating an alignment layer, a liquid crystal device, and an electronic equipment are provided to decrease the workload in maintenance and improve the productivity by preventing an alignment layer material from being stuck on an anti-sticking plate. A deposition unit(3) includes a deposition source(3a) and deposits an alignment layer material on a substrate(W) through physical vapor deposition inside a layer forming chamber(2) to form an alignment layer. A shield plate(4) is formed between the deposition unit and the substrate, includes an opening (11) of a slit shape for selectively depositing the alignment layer material, and covers a region of the substrate where the alignment layer is not formed. A first regulating member(5) is installed near the deposition source between the deposition source and the shield plate to regulate the sublimating direction of the alignment layer material of the deposition source. |
