| 摘要 |
PROBLEM TO BE SOLVED: To attain compact structure of a sensor module, high stability thereof, and satisfactory shielding therefor against an electromagnetic radiation, at low manufacturing cost and with a great measuring signal. SOLUTION: This sensor module is provided with a base 2.1 comprising metal, a hybrid substrate 2 provided with at least one another substrate layers 2.4, 2.6 for forming a substrate upper face 2.8, a radiation source 6 fixed onto the substrate upper face, a sensor element 7 fixed onto the substrate upper face, and for detecting a radiation, and a cover 4 fixed onto the base, and comprising metal. The cover has, in its inner face, an area 4.2 for reflecting the radiation, a measuring chamber 12 for storing gas or a gas mixture desired to be measured is formed between the cover and the hybrid substrate, and the sensor element is arranged to detect the radiation emitted from the radiation source into the measuring chamber, and reflected thereafter by the reflecting area. COPYRIGHT: (C)2007,JPO&INPIT |
