| 摘要 |
PROBLEM TO BE SOLVED: To provide a manufacturing method of an optical element which can be used as a polarization element and a diffraction grating, has high reliability provided with heat resistance and light resistance, and is inexpensive and excellent in mass-productivity. SOLUTION: The manufacturing method of optical element is provided with: a process of forming a resist 15 having a fringe pattern on a substrate 11A made of dielectric; a process of imparting a plating resistance to the resist 15; a first plating process of forming a first metal film 2a for gaps of the resist 15(16) formed into a fringe pattern by electroless plating; a second plating process of forming a second metal film 2c made of a metal different from the first metal film 2a on the first metal film 2a by electrolytic plating or electroless plating; and a stripping process of stripping the resist 15(16). COPYRIGHT: (C)2007,JPO&INPIT
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