| 摘要 |
PROBLEM TO BE SOLVED: To provide a conductive Ag alloy reflector electrode film with an incremental reflection film which has a high reflection factor in a short wavelength region and can maintain the reflection factor even in a working process in a post-process and its production method. SOLUTION: In the reflector electrode film, on a Ag film or a Ag alloy film, at least two layers including an ITO film which is a first transparent film having a low reflection factor and any of an ITO film which is a second transparent film having a high reflection factor, IZO film, AZO film, GZO film, ATO film, In<SB>2</SB>O<SB>3</SB>film, ZnO film, and SnO<SB>2</SB>film are laminated in order of the first transparent film and the second transparent film. COPYRIGHT: (C)2007,JPO&INPIT
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