| 摘要 |
PROBLEM TO BE SOLVED: To provide a chemical evaporator which prevents malfunctions which may occur when the chemical evaporator falls down. SOLUTION: The chemical evaporator 1 comprises an evaporator body 11 and a refilling container 12. An outer slit 27 and an opening 28 of large diameter are arranged on a front face 25 of a standing section 21 of the evaporator body 11 for volatilizing chemical within the refilling container 12. A projection is formed using a cover 41 by fixing legs 45 of the cover 41 to attachment holes 29 of the standing section 21 so that the projection projects from the front face 25 with the opening 28. By doing so, the opening 28 is covered with the cover 41 and a gap 51 is formed between the cover 41 and the front surface 25. COPYRIGHT: (C)2007,JPO&INPIT
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