| 发明名称 |
Arrangement for tool equipment |
| 摘要 |
An arrangement comprising ancillary equipment mounted to a semiconductor processing tool and service center remote from the semiconductor processing tool minimizing the local space requirements and facilitates easy access for repair.
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| 申请公布号 |
US2007012368(A1) |
申请公布日期 |
2007.01.18 |
| 申请号 |
US20050182531 |
申请日期 |
2005.07.15 |
| 申请人 |
THE BOC GROUP, INC. |
发明人 |
HUNTLEY GRAEME;WILSON KATE |
| 分类号 |
F16K27/00 |
主分类号 |
F16K27/00 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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