| 发明名称 |
Apparatus for Inspecting a Wafer |
| 摘要 |
The present invention relates to an apparatus and method for automatically inspecting a wafer, having a light source and an illumination optics for illuminating the wafer for inspection, wherein the illumination optics comprises a variable gray filter for adjusting the illumination power.
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| 申请公布号 |
US2007013902(A1) |
申请公布日期 |
2007.01.18 |
| 申请号 |
US20060422182 |
申请日期 |
2006.06.05 |
| 申请人 |
VISTEC SEMICONDUCTOR SYSTEMS GMBH |
发明人 |
BACKHAUSS HENNING;KREH ALBERT;KRAMPE-ZADLER CHRISTOF |
| 分类号 |
G01N21/88 |
主分类号 |
G01N21/88 |
| 代理机构 |
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