| 摘要 |
A work composed of any substance, regardless of whether it is insulator, semiconductor or conductor, is neutralized without an airflow change nor limiting an installation area of an apparatus. In an atmospheric air or in a prescribed low vacuum wherein a work (W) is separated from a surface (1c) of a work holding body (1), a voltage of conductors (1a, 1b) provided on the work holding body (1) is changed to induce an electric field in the vicinity of the work (W). Thus, in the electric field part, a part of the ambient gas, such as air, is instantaneously ionized to neutralize the charges left on the work (W). ® KIPO & WIPO 2007
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