| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a manufacturing method of a piezoelectric resonator chip whereby the processing time can be reduced and the cost can be decreased and to provide the piezoelectric resonator piece manufactured by this manufacturing method and having a highly accurate outer shape and an excellent frequency characteristic. <P>SOLUTION: The manufacturing method of the piezoelectric resonator piece 10 that forms an outer shape of the piezoelectric resonator chip 10 by applying etching processing to a crystal substrate 1 includes the steps of: forming an Au layer 50 on the surface of a Cr plasma alteration layer 40 by applying plasma processing to the surface of a Cr layer 30; forming the Au layer 50 on the surface of the Cr plasma alteration layer 40; forming a protect film 70 comprising the Cr layer 30, the Cr plasma alteration layer 40, and the Au layer 50; and forming the outer shape of the piezoelectric resonator piece 10 by etching processing. Further, the piezoelectric resonator piece 10 manufactured by this manufacturing method has a perpendicular cross-section a highly accurate outer shape, and an excellent frequency characteristic. <P>COPYRIGHT: (C)2007,JPO&INPIT |
