| 摘要 |
PROBLEM TO BE SOLVED: To precisely measure a wedge angle, to enhance the number of pair acquisitions, and to make pair combination work efficient. SOLUTION: This device for determining a wedge angle measurement pair is provided with a laser beam source 2, a polarization plate 3, a stage 1 mounted with a setting jig for a rutile polarization element 4, a calescence point plate 5 for reflecting a calescence point image of a laser beam transmitted through the rutile polarization element 4, a CCD camera 6 with a height variable from a reference face and for imaging laser calescence points 9, 10, and a wedge angle measuring means having a computer 7 and a program 8 for calculating the wedge angle based on positions of the laser calescence points 9, 10. The device is further provided with a pair determination means for selecting the pair of polarization elements within a set angle difference to form a group, and for determining the pair group not only to maximize the pair number but also to minimize an average value of the angle differences in the group where the pair number gets maximum. COPYRIGHT: (C)2007,JPO&INPIT
|
