| 摘要 |
A manufacturing apparatus for manufacturing an oriented film, comprising: a film formation chamber; an evaporation section having an evaporation source, evaporating an oriented film material on the substrate by a physical vapor deposition, and forming the oriented film in the film formation chamber; a shielding plate arranged between the evaporation section and the substrate, having an elongated opening for selectively evaporating the oriented film material, and covering an area of the substrate on which the oriented film is not formed; a transfer chamber connected to the film formation chamber via a gate valve; a storing chamber connected to the transfer chamber and storing an unused shielding plate; and a substituting device arranged in the transfer chamber and substituting the shielding plate arranged in the film formation chamber to the unused shielding plate stored in the storing chamber.
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