| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To enhance quality reliability of a cathode structure by reducing its heat loss. <P>SOLUTION: This cathode structure is equipped with a sleeve 2 to house a heater 1, a cylindrical cathode support 3 disposed to surround the outside face of the sleeve 2, and a plurality of support members 4 to connect the sleeve 2 to the cathode support 3 so that the center axis 2a of the sleeve 2 almost coincides with the center axis of the cathode support 3. The longitudinal direction of each of a plurality of the support members 4 is not in parallel with any plane containing the center axis 2a. <P>COPYRIGHT: (C)2007,JPO&INPIT</p> |
