| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a method for manufacturing a large pellicle in which nonuniform thickness and surface unevenness of an adhesive layer are improved, and which is in no danger of reduction of sticking power, contamination of a photomask and breakage of an exposure device. <P>SOLUTION: In a large pellicle with a pellicle area of≥1,500 cm<SP>2</SP>comprising at least a pellicle film, a pellicle frame with the pellicle film stuck to one end face thereof, and an adhesive layer disposed on the other end face of the pellicle frame, when the adhesive layer is formed on the pellicle frame, a pressure-sensitive adhesive of the adhesive layer is stuck to the pellicle frame in a state of a substantially uniform mixture with at least one liquid. The liquid substantially uniformly mixed with the pressure-sensitive adhesive of the adhesive layer is preferably a carbon-containing liquid and preferably has a boiling point under 1 atm of 25-250°C and a surface tension of 5-80 mN/m. <P>COPYRIGHT: (C)2007,JPO&INPIT</p> |
