| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To improve the utilization efficiently of laser light upon laser machining in a laser machining device, thus to efficiently subject a work to machining. <P>SOLUTION: The laser beam machining device is provided with: a laser oscillator 1 of generating laser light L<SB>2</SB>and L<SB>3</SB>; a micro mirror array 7 in which a plurality of micro mirrors are regularly arranged, and, which converts the laser light L<SB>2</SB>and L<SB>3</SB>into modulated light L<SB>M</SB>having a cross-sectional shape corresponding to a machining pattern of a work 15; an irradiation optical system 20 of emitting the modulated light L<SB>M</SB>to the work 15 and performing laser machining; and gradient stages 4, 5 of making the gradients of the laser oscillator 1 and micro mirror array 7 variable. <P>COPYRIGHT: (C)2007,JPO&INPIT</p> |
