| 摘要 |
PROBLEM TO BE SOLVED: To enable measurement of a landing angle in a multi-electron beam type exposure device of a low current value per a beam, and enable high precision of the landing angle absolute value and the relative landing angle with a high SN ratio in a charged particle beam application device. SOLUTION: In a transmission type detector of a combination of two sheets of throttling plates (first throttling 6a and second throttling 6b) and a detector 6c, it has a structure that a detection prospective angle decided from a spacing h between the first throttling 6a and the second throttling 6b and an opening diameter d of the second throttling 6b is made to nearly coincide with an opening angle of the measured electron beam 10, or that the detection prospective angle a is made to be smaller than the opening angle, and the landing angle is decided from the relationship between the micro-opening 11 center of the first throttling and the opening 12 center of the second throttling in which the detected current value becomes the maximum. COPYRIGHT: (C)2007,JPO&INPIT
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