| 摘要 |
PROBLEM TO BE SOLVED: To provide a more compactible and cost-reducible electron beam irradiation device than a conventional electron beam irradiation device. SOLUTION: This electron beam irradiation device including a vacuum chamber 20 and an electron beam source 10 installed in the vacuum chamber 20 is equipped with an electron beam irradiation window part 30 on an opening frame part 21 of the vacuum chamber 20. The electron beam irradiation window part 30 has a window frame member 31, a window foil 33 covering an opening part 31 for electron beam transmission of the window frame member 31, and a window foil pressing member 32. The window foil pressing member 32 has a nozzle 322 for spraying cooling gas to the window foil 33. In the electron beam irradiation device A, a duct part 5 communicated with the nozzle 322, for supplying the cooling gas to the nozzle is formed integrally inside the window frame member 31. COPYRIGHT: (C)2007,JPO&INPIT
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