<p>Provided is a substrate transfer apparatus having excellent workability which can transfer a substrate without taking around a vacuum pump and a power supply code of the vacuum pump while transferring the substrate. The substrate transfer apparatus is provided with a plurality of suction pads on a main body, and the substrate is held and transferred by vacuum-sucking the substrate by the suction pads. The substrate transfer apparatus is characterized in that the suction pads are provided with a vacuum chamber through a first valve, and the vacuum pump is removably attached to the vacuum chamber through a second valve and a connecting section.</p>
