发明名称 LIQUID DELIVERY SYSTEM
摘要 The present invention is a method for delivering liquid that minimizes the formation of microbubbles in the liquid, and a system for the same. The method entails supplying liquid from a fluid container into a flow path. The liquid is delivered through the flow path to a downstream process while maintaining the liquid at a pressure that inhibits formation of microbubbles in the liquid.
申请公布号 WO2006007376(A3) 申请公布日期 2007.01.18
申请号 WO2005US21182 申请日期 2005.06.15
申请人 ADVANCED TECHNOLOGY MATERIALS, INC.;O'DOUGHERTY, KEVIN, T.;ANDREWS, ROBERT, E.;TITUS, JOHN 发明人 O'DOUGHERTY, KEVIN, T.;ANDREWS, ROBERT, E.;TITUS, JOHN
分类号 B67D7/72;B01D19/00;B01D19/02 主分类号 B67D7/72
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