The present invention is a method for delivering liquid that minimizes the formation of microbubbles in the liquid, and a system for the same. The method entails supplying liquid from a fluid container into a flow path. The liquid is delivered through the flow path to a downstream process while maintaining the liquid at a pressure that inhibits formation of microbubbles in the liquid.
申请公布号
WO2006007376(A3)
申请公布日期
2007.01.18
申请号
WO2005US21182
申请日期
2005.06.15
申请人
ADVANCED TECHNOLOGY MATERIALS, INC.;O'DOUGHERTY, KEVIN, T.;ANDREWS, ROBERT, E.;TITUS, JOHN
发明人
O'DOUGHERTY, KEVIN, T.;ANDREWS, ROBERT, E.;TITUS, JOHN