| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide an acoustic sensor for improving sensitivity while downsizing the acoustic sensor. <P>SOLUTION: The acoustic sensor is provided with: a back pole plate 10; and a diaphragm 7 including a polysilicon layer 5b arranged so as to be vibrated oppositely to the back pole plate 10 with a predetermined distance, and a power generation film 6 constituted of a piezoelectric body which generates a power in such a way that it is vibrated with the polysilicon layer 5b. The polysilicon layer 5b is configured so that electric charge to be supplied from the power generation film 6 can be stored, and sound is converted into an electric signal on the basis of the change of capacitance between the diaphragm 7 and the back pole plate 10. <P>COPYRIGHT: (C)2007,JPO&INPIT</p> |
