| 摘要 |
PROBLEM TO BE SOLVED: To evaporate raw materials without using a crucible, thus, to generate raw material vapor with high purity, further, to highly retain evaporation efficiency, and to efficiently produce particulates with high purity. SOLUTION: The vapor generator comprises: a vertical duct-shaped vertical furnace 1 to form into a path of falling raw material powder 8; a heater 2 provided around the vertical furnace 1 and heating the raw material powder 8 in the vertical furnace 1; a raw material powder feeding part 4 of falling the raw material powder 8 into the vertical furnace 1 every fixed amount; and a vapor transferring duct 6 of feeding vapor generated in the vertical furnace 1 to an objective position. In this case, it is preferable that reactive gas and inert gas are fed into the vertical furnace 1, and swirling is applied to the flow of the gases. COPYRIGHT: (C)2007,JPO&INPIT
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