发明名称 A TEMPERATURE SENSING DEVICE
摘要 The present invention relates to an integrated device, comprising a semiconductor device (30) formed on a semiconductor substrate(4), a temperature sensing element (15) formed on the semiconductor substrate (4), an electrically insulating layer (16) formed over the temperature sensing element (15), and a metal layer (20) formed over the insulation layer (16) and substantially covering the semiconductor device (30) and the temperature sensing element (15). The present invention also relates to a method of forming a temperature sensing element (15) for integration with a semiconductor device (30).
申请公布号 WO2007006337(A1) 申请公布日期 2007.01.18
申请号 WO2005EP09174 申请日期 2005.07.13
申请人 FREESCALE SEMICONDUCTOR, INC.;REYNES, JEAN-MICHEL;DERAM, ALAIN, J;MARTY, ERIC;SAUVEPLANE, JEAN-BAPTISTE 发明人 REYNES, JEAN-MICHEL;DERAM, ALAIN, J;MARTY, ERIC;SAUVEPLANE, JEAN-BAPTISTE
分类号 H01L29/78;H01L21/336;H01L21/8234;H01L27/06 主分类号 H01L29/78
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