| 摘要 |
PROBLEM TO BE SOLVED: To provide a foreign matter detector capable of obtaining a detection result of high reliability by efficiently irradiating a foreign matter with a laser beam to largely grasp a change. SOLUTION: The fine foreign matter detector S is constituted of a floodlight projection unit 30 capable of emitting the laser beam, a light detecting camera 40 constituted by arranging imaging elements on a light detecting surface 41A in a matrix state and a controller 50 to detect the foreign matter on the basis of a change in the image data outputted from the light detecting camera 40. The height of the center position of the laser emitting port 32 of the floodlight projection unit 30 is almost equal to the height of the upper surface W1 of a glass substrate W and the foreign matter is irradiated with the center part of the laser beam, that is, the highest part of luminous intensity. Since a change in the image data appears clearly by this constitution, detection precision can be more enhanced. COPYRIGHT: (C)2007,JPO&INPIT |
